Inventor

WISE RICH

US4 patents

⚠️ This page may combine multiple inventors who share the name “WISE RICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US7344991B2Mar 18, 2008

Method and apparatus for multilayer photoresist dry development

TOKYO ELECTRON LTD6 citations60

US8048325B2Nov 1, 2011

Method and apparatus for multilayer photoresist dry development

TOKYO ELECTRON LTD1 citations44

LAM RES CORP

1 patent

US12372872B2Jul 29, 2025

Extreme ultraviolet (EUV) lithography using an intervening layer or a multi-layer stack with varying mean free paths for secondary electron generation

LAM RES CORP0 citations59

COVENTOR INC

1 patent

US10885253B2Jan 5, 2021

System and method for determining dimensional range of repairable defects by deposition and etching in a virtual fabrication environment

COVENTOR INC0 citations44