Inventor

PANG HSIU LAN

TW5 patents

⚠️ This page may combine multiple inventors who share the name “PANG HSIU LAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NANOMETRICS INC

2 patents

US7847939B2Dec 7, 2010

Overlay measurement target

NANOMETRICS INC12 citations82

US7477396B2Jan 13, 2009

Methods and systems for determining overlay error based on target image symmetry

NANOMETRICS INC14 citations82

KU YI SHA

2 patents

US8321821B2Nov 27, 2012

Method for designing two-dimensional array overlay targets and method and system for measuring overlay errors using the same

KU YI SHA4 citations59

US8139233B2Mar 20, 2012

System and method for via structure measurement

KU YI SHA2 citations59

HSU WEI TE

1 patent

US8250497B2Aug 21, 2012

Method for designing two-dimensional array overlay target sets and method and system for measuring overlay errors using the same

HSU WEI TE11 citations78