Inventor
BAE SUKJONG
KR4 patents
Patents
4 patentsUS10056229B2Aug 21, 2018
Charged-particle beam exposure method and charged-particle beam correction method
SAMSUNG ELECTRONICS CO LTD2 citations68
US12276907B2Apr 15, 2025
Photoresist inspection apparatus, photoresist inspection method using the same, and electron beam exposure apparatus
SAMSUNG ELECTRONICS CO LTD0 citations51
US9323142B2Apr 26, 2016
Methods of reducing registration errors of photomasks and photomasks formed using the methods
SAMSUNG ELECTRONICS CO LTD0 citations45
US9588415B2Mar 7, 2017
Electron beam exposure system and methods of performing exposing and patterning processes using the same
SAMSUNG ELECTRONICS CO LTD0 citations38