Inventor
SHIMOAOKI TAKESHI
JP8 patents
Patents
8 patentsUS9690202B2Jun 27, 2017
Developing method, developing apparatus and storage medium
TOKYO ELECTRON LTD2 citations72
US11079679B2Aug 3, 2021
Substrate processing method and recording medium capable of suppressing non-uniformity in degree of progression of processing depending on position on substrate
TOKYO ELECTRON LTD1 citations61
US7977039B2Jul 12, 2011
Rinse treatment method, developing treatment method and developing apparatus
TOKYO ELECTRON LTD6 citations61
US10359702B2Jul 23, 2019
Development processing apparatus, development processing method, and storage medium
TOKYO ELECTRON LTD1 citations60
US7419773B2Sep 2, 2008
Rinsing method and developing method
TOKYO ELECTRON LTD6 citations59
US10203605B2Feb 12, 2019
Development method, development device, and non-transitory computer-readable storage medium
TOKYO ELECTRON LTD0 citations50
US10185220B2Jan 22, 2019
Substrate processing method, substrate processing apparatus, and non-transitory computer-readable medium
TOKYO ELECTRON LTD0 citations40
US10108111B1Oct 23, 2018
Developing method, developing apparatus, and storage medium
TOKYO ELECTRON LTD0 citations39