Inventor
VORWERK MANUEL
AT4 patents
⚠️ This page may combine multiple inventors who share the name “VORWERK MANUEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
2 patentsUS6838216B2Jan 4, 2005
Photolithographic mask and methods for producing a structure and of exposing a wafer in a projection apparatus
INFINEON TECHNOLOGIES AG9 citations70
US7251016B2Jul 31, 2007
Method for correcting structure-size-dependent positioning errors in photolithography
INFINEON TECHNOLOGIES AG2 citations56