Inventor

PARANJAPE MANDAR

US2 patents

Patents

2 patents

US12345658B2Jul 1, 2025

Large-particle monitoring with laser power control for defect inspection

KLA CORP0 citations57

US11374375B2Jun 28, 2022

Laser closed power loop with an acousto-optic modulator for power modulation

KLA CORP0 citations52