Inventor

CUI STEVE YIFENG

US5 patents

⚠️ This page may combine multiple inventors who share the name “CUI STEVE YIFENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR TECH CORP

2 patents

US7103484B1Sep 5, 2006

Non-contact methods for measuring electrical thickness and determining nitrogen content of insulating films

KLA TENCOR TECH CORP54 citations92

US7728965B2Jun 1, 2010

Systems and methods for inspecting an edge of a specimen

KLA TENCOR TECH CORP23 citations84

KLA CORP

2 patents

US11374375B2Jun 28, 2022

Laser closed power loop with an acousto-optic modulator for power modulation

KLA CORP0 citations52

US11181484B1Nov 23, 2021

Systems and methods for advanced defect ablation protection

KLA CORP0 citations50

KLA TENCOR CORP

1 patent

US10324045B2Jun 18, 2019

Surface defect inspection with large particle monitoring and laser power control

KLA TENCOR CORP4 citations68