Inventor
LUERE OLIVIER
US36 patents
⚠️ This page may combine multiple inventors who share the name “LUERE OLIVIER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
35 patentsUS9269590B2Feb 23, 2016
Spacer formation
APPLIED MATERIALS INC195 citations99
US10791617B2Sep 29, 2020
Method of controlling ion energy distribution using a pulse generator with a current-return output stage
APPLIED MATERIALS INC62 citations98
US10685807B2Jun 16, 2020
Creating ion energy distribution functions (IEDF)
APPLIED MATERIALS INC38 citations98
US10555412B2Feb 4, 2020
Method of controlling ion energy distribution using a pulse generator with a current-return output stage
APPLIED MATERIALS INC67 citations98
US10448494B1Oct 15, 2019
Method of controlling ion energy distribution using a pulse generator with a current-return output stage
APPLIED MATERIALS INC68 citations98
US10448495B1Oct 15, 2019
Method of controlling ion energy distribution using a pulse generator with a current-return output stage
APPLIED MATERIALS INC63 citations98
US9947517B1Apr 17, 2018
Adjustable extended electrode for edge uniformity control
APPLIED MATERIALS INC48 citations98
US10923321B2Feb 16, 2021
Apparatus and method of generating a pulsed waveform
APPLIED MATERIALS INC52 citations97
US10916408B2Feb 9, 2021
Apparatus and method of forming plasma using a pulsed waveform
APPLIED MATERIALS INC54 citations97
US10312048B2Jun 4, 2019
Creating ion energy distribution functions (IEDF)
APPLIED MATERIALS INC48 citations97
USD797691SSep 19, 2017
Composite edge ring
APPLIED MATERIALS INC59 citations97
US11284500B2Mar 22, 2022
Method of controlling ion energy distribution using a pulse generator
APPLIED MATERIALS INC21 citations94
US10504702B2Dec 10, 2019
Adjustable extended electrode for edge uniformity control
APPLIED MATERIALS INC14 citations94
US10103010B2Oct 16, 2018
Adjustable extended electrode for edge uniformity control
APPLIED MATERIALS INC34 citations94
US11462389B2Oct 4, 2022
Pulsed-voltage hardware assembly for use in a plasma processing system
APPLIED MATERIALS INC12 citations93
US11848176B2Dec 19, 2023
Plasma processing using pulsed-voltage and radio-frequency power
APPLIED MATERIALS INC5 citations86
US11728124B2Aug 15, 2023
Creating ion energy distribution functions (IEDF)
APPLIED MATERIALS INC5 citations86
US10991556B2Apr 27, 2021
Adjustable extended electrode for edge uniformity control
APPLIED MATERIALS INC11 citations86
US10553404B2Feb 4, 2020
Adjustable extended electrode for edge uniformity control
APPLIED MATERIALS INC13 citations86
US11776789B2Oct 3, 2023
Plasma processing assembly using pulsed-voltage and radio-frequency power
APPLIED MATERIALS INC6 citations85
US11699572B2Jul 11, 2023
Feedback loop for controlling a pulsed voltage waveform
APPLIED MATERIALS INC8 citations85
US11462388B2Oct 4, 2022
Plasma processing assembly using pulsed-voltage and radio-frequency power
APPLIED MATERIALS INC6 citations85
US11393710B2Jul 19, 2022
Wafer edge ring lifting solution
APPLIED MATERIALS INC9 citations85
US11069504B2Jul 20, 2021
Creating ion energy distribution functions (IEDF)
APPLIED MATERIALS INC7 citations84
US12237148B2Feb 25, 2025
Plasma processing assembly using pulsed-voltage and radio-frequency power
APPLIED MATERIALS INC2 citations74
US11508554B2Nov 22, 2022
High voltage filter assembly
APPLIED MATERIALS INC4 citations73
US9520302B2Dec 13, 2016
Methods for controlling Fin recess loading
APPLIED MATERIALS INC3 citations73
US12094752B2Sep 17, 2024
Wafer edge ring lifting solution
APPLIED MATERIALS INC1 citations62
US12057292B2Aug 6, 2024
Feedback loop for controlling a pulsed voltage waveform
APPLIED MATERIALS INC0 citations62
US11482402B2Oct 25, 2022
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC0 citations62
US11521849B2Dec 6, 2022
In-situ deposition process
APPLIED MATERIALS INC0 citations60
US12278110B2Apr 15, 2025
Bias voltage modulation approach for SiO/SiN layer alternating etch process
APPLIED MATERIALS INC0 citations53
US11049760B2Jun 29, 2021
Universal process kit
APPLIED MATERIALS INC0 citations52
US10109464B2Oct 23, 2018
Minimization of ring erosion during plasma processes
APPLIED MATERIALS INC0 citations52
US12456611B2Oct 28, 2025
Systems and methods for controlling a voltage waveform at a substrate during plasma processing
APPLIED MATERIALS INC0 citations51