Inventor
HAN HYUN
KR8 patents
⚠️ This page may combine multiple inventors who share the name “HAN HYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS6402849B2Jun 11, 2002
Process tube having slit type process gas injection portion and hole type waste gas exhaust portion, and apparatus for fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD105 citations95
US6223096B1Apr 24, 2001
Elevator system for transferring a wafer boat with automatic horizontal attitude control
SAMSUNG ELECTRONICS CO LTD11 citations65
US6464930B2Oct 15, 2002
Furnace of apparatus for manufacturing a semiconductor device having a heat blocker for preventing heat loss during the unloading of wafers
SAMSUNG ELECTRONICS CO LTD4 citations59