Inventor
TACHIBANA TAIJI
JP3 patents
Patents
3 patentsUS6280518B1Aug 28, 2001
Organic titanium compound suitable for MOCVD
MITSUBISHI MATERIALS CORP9 citations71
US6485554B1Nov 26, 2002
Solution raw material for forming composite oxide type dielectric thin film and dielectric thin film
MITSUBISHI MATERIALS CORP5 citations60
US6355097B2Mar 12, 2002
Organic titanium compound suitable for MOCVD
MITSUBISHI MATERIALS CORP3 citations60