Inventor
PANG BEN
US4 patents
Patents
4 patentsUS6194628B1Feb 27, 2001
Method and apparatus for cleaning a vacuum line in a CVD system
APPLIED MATERIALS INC170 citations98
US6193802B1Feb 27, 2001
Parallel plate apparatus for in-situ vacuum line cleaning for substrate processing equipment
APPLIED MATERIALS INC191 citations98
US6680420B2Jan 20, 2004
Apparatus for cleaning an exhaust line in a semiconductor processing system
APPLIED MATERIALS INC45 citations95
US6689930B1Feb 10, 2004
Method and apparatus for cleaning an exhaust line in a semiconductor processing system
APPLIED MATERIALS INC51 citations93