Inventor
TAYLOR JR WILLIAM N
US8 patents
Patents
8 patentsUS6187072B1Feb 13, 2001
Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions
APPLIED MATERIALS INC154 citations99
US6193802B1Feb 27, 2001
Parallel plate apparatus for in-situ vacuum line cleaning for substrate processing equipment
APPLIED MATERIALS INC191 citations98
US6194628B1Feb 27, 2001
Method and apparatus for cleaning a vacuum line in a CVD system
APPLIED MATERIALS INC170 citations98
US6517913B1Feb 11, 2003
Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions
APPLIED MATERIALS INC65 citations96
US6680420B2Jan 20, 2004
Apparatus for cleaning an exhaust line in a semiconductor processing system
APPLIED MATERIALS INC45 citations95
US6485248B1Nov 26, 2002
Multiple wafer lift apparatus and associated method
APPLIED MATERIALS INC62 citations95
US6689930B1Feb 10, 2004
Method and apparatus for cleaning an exhaust line in a semiconductor processing system
APPLIED MATERIALS INC51 citations93
US6147855ANov 14, 2000
Variable capacitor
APPLIED MATERIALS INC7 citations73