Inventor
ENDOU KAZUNORI
JP4 patents
Patents
4 patentsUS6863281B2Mar 8, 2005
Chucking apparatus and production method for the same
SUMITOMO OSAKA CEMENT CO LTD493 citations96
US6444957B1Sep 3, 2002
Heating apparatus
SUMITOMO OSAKA CEMENT CO LTD26 citations92
US7175714B2Feb 13, 2007
Electrode-built-in susceptor and a manufacturing method therefor
SUMITOMO OSAKA CEMENT CO LTD28 citations91
US6872908B2Mar 29, 2005
Susceptor with built-in electrode and manufacturing method therefor
SUMITOMO OSAKA CEMENT CO LTD11 citations72