P

Inventor

INAZUMACHI HIROSHI

JP6 patents
⚠️ This page may combine multiple inventors who share the name “INAZUMACHI HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUMITOMO OSAKA CEMENT CO LTD

3 patents
US6863281B2Mar 8, 2005

Chucking apparatus and production method for the same

SUMITOMO OSAKA CEMENT CO LTD493 citations96
US6838646B2Jan 4, 2005

Susceptor device

SUMITOMO OSAKA CEMENT CO LTD15 citations82
US6693789B2Feb 17, 2004

Susceptor and manufacturing method thereof

SUMITOMO OSAKA CEMENT CO LTD13 citations82

TOKYO ELECTRON LTD

1 patent
US7619870B2Nov 17, 2009

Electrostatic chuck

TOKYO ELECTRON LTD24 citations92

HIMORI SHINJI

1 patent
US8284538B2Oct 9, 2012

Electrostatic chuck device

HIMORI SHINJI5 citations61

INAZUMACHI HIROSHI

1 patent
US8264813B2Sep 11, 2012

Electrostatic chuck device

INAZUMACHI HIROSHI1 citations44