Inventor
SHIBAMOTO MASAHIRO
JP19 patents
⚠️ This page may combine multiple inventors who share the name “SHIBAMOTO MASAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON ANELVA CORP
12 patentsUS7625450B2Dec 1, 2009
Film forming apparatus
CANON ANELVA CORP9 citations83
US11289305B2Mar 29, 2022
Deposition method and deposition apparatus
CANON ANELVA CORP2 citations67
US8053747B2Nov 8, 2011
Substrate processing apparatus and cleaning method of the same
CANON ANELVA CORP3 citations62
US12438075B2Oct 7, 2025
Method for manufacturing a laminated body
CANON ANELVA CORP0 citations58
US10917960B2Feb 9, 2021
Deposition apparatus
CANON ANELVA CORP0 citations58
US8715417B2May 6, 2014
Film forming apparatus
CANON ANELVA CORP0 citations51
US11600295B2Mar 7, 2023
Vacuum process apparatus and vacuum process method
CANON ANELVA CORP0 citations50
US10971332B2Apr 6, 2021
Plasma processing apparatus and plasma processing method
CANON ANELVA CORP0 citations49
US7517438B2Apr 14, 2009
Magnetic recording disk, magnetic recording disk manufacturing method and magnetic recording disk manufacturing system
CANON ANELVA CORP0 citations48
US10011899B2Jul 3, 2018
Deposition apparatus
CANON ANELVA CORP0 citations47
US10731245B2Aug 4, 2020
Vacuum arc deposition apparatus and deposition method
CANON ANELVA CORP0 citations36
US10626494B2Apr 21, 2020
Plasma CVD apparatus and vacuum treatment apparatus
CANON ANELVA CORP0 citations33
ANELVA CORP
4 patentsUS6740209B2May 25, 2004
Multilayer film deposition apparatus, and method and apparatus for manufacturing perpendicular-magnetic-recording media
ANELVA CORP23 citations91
US7935187B2May 3, 2011
Film forming apparatus
ANELVA CORP4 citations73
US7115191B2Oct 3, 2006
Magnetic recording disk, magnetic recording disk manufacturing method and magnetic recording disk manufacturing system
ANELVA CORP3 citations58
US8377210B2Feb 19, 2013
Film forming apparatus
ANELVA CORP0 citations51