Inventor
HINCKLEY KELLY
US3 patents
Patents
3 patentsUS7078337B2Jul 18, 2006
Selective isotropic etch for titanium-based materials
AGERE SYSTEMS INC11 citations78
US7476951B2Jan 13, 2009
Selective isotropic etch for titanium-based materials
AGERE SYSTEMS INC6 citations68
US7157375B2Jan 2, 2007
Methods of downstream microwave photoresist removal and via clean, particularly following Stop-On TiN etching
AGERE SYSTEMS INC1 citations42