Inventor

PATEL BENU B

US2 patents

Patents

2 patents

US7078337B2Jul 18, 2006

Selective isotropic etch for titanium-based materials

AGERE SYSTEMS INC11 citations78

US7476951B2Jan 13, 2009

Selective isotropic etch for titanium-based materials

AGERE SYSTEMS INC6 citations68