Inventor
SYTSMA JOOST
NL4 patents
Patents
4 patentsUS6404499B1Jun 11, 2002
Lithography apparatus with filters for optimizing uniformity of an image
ASML NETHERLANDS BV81 citations89
US7061586B2Jun 13, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations82
US7190434B2Mar 13, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations62
US7428040B2Sep 23, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51