Inventor

VAN ES MAARTEN HUBERTUS

NL20 patents

⚠️ This page may combine multiple inventors who share the name “VAN ES MAARTEN HUBERTUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VAN ES MAARTEN HUBERTUS

TNO

Method of and system for performing defect detection on or characterization of a layer of a semiconductor element or semi-manufactured semiconductor element

Method of determining an overlay error, method for manufacturing a multilayer semiconductor device, atomic force microscopy device, lithographic system and semiconductor device

Method of and system for determining an overlay or alignment error between a first and a second device layer of a multilayer semiconductor device

Frequency tracking for subsurface atomic force microscopy

Atomic force microscopy cantilever, system and method

Method of and system for performing subsurface imaging using vibration sensing

Method of and atomic force microscopy system for performing subsurface imaging

Heterodyne scanning probe microscopy method and system

Method of performing atomic force microscopy with an ultrasound transducer

Atomic force microscopy system, method for mapping one or more subsurface structures located in a semiconductor device or for monitoring lithographic parameters in a semiconductor device and use of such an atomic force microscopy system

Atomic force microscopy device, method and lithographic system

Heterodyne atomic force microscopy device, method and lithographic system

Method, system and computer program for performing acoustic scanning probe microscopy

Method of and system for performing detection on or characterization of a sample

Cantilever, ultrasound acoustic microscopy device comprising the cantilever, method of using the same and lithographic system including the same

Ultrasound sub-surface probe microscopy device and corresponding method

Heterodyne scanning probe microscopy method and scanning probe microscopy system

Lithographic patterning method and system therefore

Scanning probe microscope with a reduced Q-factor

NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO

Method of tuning parameter settings for performing acoustic scanning probe microscopy for subsurface imaging, scanning probe microscopy system, and computer program product