Inventor

SADEGHIAN MARNANI HAMED

NL45 patents

⚠️ This page may combine multiple inventors who share the name “SADEGHIAN MARNANI HAMED”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SADEGHIAN MARNANI HAMED

TNO

Probe calibration

Method of positioning a carrier on a flat surface, and assembly of a carrier and a positioning member

System and method of performing scanning probe microscopy on a substrate surface

Method of and system for performing defect detection on or characterization of a layer of a semiconductor element or semi-manufactured semiconductor element

Distance sensor, alignment system and method

Method of and system for detecting structures on or below the surface of a sample using a probe including a cantilever and a probe tip

Alignment system and method

Calibration of a mechanical property of SPM cantilevers

Method of determining an overlay error, method for manufacturing a multilayer semiconductor device, atomic force microscopy device, lithographic system and semiconductor device

Method of positioning a carrier on a flat surface, and assembly of a carrier and a positioning member

Method of and system for determining an overlay or alignment error between a first and a second device layer of a multilayer semiconductor device

Scanning probe microscope, scan head and method

Frequency tracking for subsurface atomic force microscopy

Lithographic patterning method

Thermal probe for a near-field thermal microscope and method for generating a thermal map

Method for measuring damage of a substrate caused by an electron beam

Device and method for measuring and/or modifying surface features on a surface of a sample

Atomic force microscopy cantilever, system and method

Method of and system for performing subsurface imaging using vibration sensing

Subsurface atomic force microscopy with guided ultrasound waves

Method of and atomic force microscopy system for performing subsurface imaging

High throughput scanning probe microscopy device

Heterodyne scanning probe microscopy method and system

Scanning probe microscopy system for and method of mapping nanostructures on the surface of a sample

Method of performing atomic force microscopy with an ultrasound transducer

Atomic force microscopy system, method for mapping one or more subsurface structures located in a semiconductor device or for monitoring lithographic parameters in a semiconductor device and use of such an atomic force microscopy system

Atomic force microscopy device, method and lithographic system

Heterodyne atomic force microscopy device, method and lithographic system

Method of and system for performing detection on or characterization of a sample

Method, atomic force microscopy system and computer program product

Heterodyne scanning probe microscopy method and scanning probe microscopy system

Thermal nanolithography method and system

Positioning arm for and method of placing a scan head on a support surface

Method of determining an overlay error, manufacturing method and system for manufacturing of a multilayer semiconductor device, and semiconductor device manufactured thereby

Scanning probe microscope with a reduced Q-factor

Method of performing surface measurements on a surface of a sample, and scanning probe microscopy system therefore

Determining interaction forces in a dynamic mode AFM during imaging

NEARFIELD INSTR B V

Compact optical microscope, metrology device comprising the optical microscope and a wafer positioning metrology apparatus comprising the metrology device

Automated landing method of a scanning probe microscopy system and scanning probe microscopy system using the same

Probe cassette and method for storing, transporting and handling one or more probe devices for a probe based system

Alignment system and method for aligning an object having an alignment mark

Arrangement for and method of determining cantilever deflection in a scanning probe microscopy system

NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO

Method of advancing a probe tip of a scanning microscopy device towards a sample surface, and device therefore

High throughput microscopy device

Method of tuning parameter settings for performing acoustic scanning probe microscopy for subsurface imaging, scanning probe microscopy system, and computer program product