Inventor
BECKER ROBERT K
US10 patents
⚠️ This page may combine multiple inventors who share the name “BECKER ROBERT K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEL EPION INC
4 patentsUS9305746B2Apr 5, 2016
Pre-aligned nozzle/skimmer
TEL EPION INC2 citations61
US9029808B2May 12, 2015
Low contamination scanner for GCIB system
TEL EPION INC3 citations59
US9540725B2Jan 10, 2017
Method and apparatus for beam deflection in a gas cluster ion beam system
TEL EPION INC1 citations48
US9343259B2May 17, 2016
GCIB nozzle assembly
TEL EPION INC0 citations40
TABAT MARTIN D
3 patentsUS8097860B2Jan 17, 2012
Multiple nozzle gas cluster ion beam processing system and method of operating
TABAT MARTIN D13 citations82
US8981322B2Mar 17, 2015
Multiple nozzle gas cluster ion beam system
TABAT MARTIN D2 citations61
US8304033B2Nov 6, 2012
Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzles
TABAT MARTIN D3 citations61
EPION CORP
2 patentsUS6676989B2Jan 13, 2004
Method and system for improving the effectiveness of medical stents by the application of gas cluster ion beam technology
EPION CORP145 citations98
US7060988B2Jun 13, 2006
Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system
EPION CORP17 citations83