Inventor
SHINACHI SATOSHI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “SHINACHI SATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HARADA YUJI
2 patentsSHINETSU CHEMICAL CO
2 patentsUS7833694B2Nov 16, 2010
Lactone-containing compound, polymer, resist composition, and patterning process
SHINETSU CHEMICAL CO9 citations83
US8933251B2Jan 13, 2015
Fluorinated monomer of cyclic acetal structure, polymer, resist protective coating composition, resist composition, and patterning process
SHINETSU CHEMICAL CO0 citations52