Inventor
AUBUCHON JOSEPH
US30 patents
Patents
30 patentsUS9252024B2Feb 2, 2016
Deposition chambers with UV treatment and methods of use
APPLIED MATERIALS INC469 citations98
US11584993B2Feb 21, 2023
Thermally uniform deposition station
APPLIED MATERIALS INC4 citations74
US11626281B2Apr 11, 2023
PEALD nitride films
APPLIED MATERIALS INC2 citations73
US11110425B2Sep 7, 2021
Gas distribution plate for thermal deposition
APPLIED MATERIALS INC4 citations73
US11220747B2Jan 11, 2022
Complementary pattern station designs
APPLIED MATERIALS INC2 citations72
US11169547B2Nov 9, 2021
Gas-pulsing-based shared precursor distribution system and methods of use
APPLIED MATERIALS INC2 citations70
US12584219B2Mar 24, 2026
Methods for controlling pulse shape in ALD processes
APPLIED MATERIALS INC0 citations62
US12305283B2May 20, 2025
Dithering or dynamic offsets for improved uniformity
APPLIED MATERIALS INC0 citations62
US12119221B2Oct 15, 2024
PEALD nitride films
APPLIED MATERIALS INC0 citations62
US12077861B2Sep 3, 2024
Dithering or dynamic offsets for improved uniformity
APPLIED MATERIALS INC0 citations62
US11978625B2May 7, 2024
Methods of forming metal nitride films
APPLIED MATERIALS INC0 citations62
US11894257B2Feb 6, 2024
Single wafer processing environments with spatial separation
APPLIED MATERIALS INC0 citations62
US11761083B2Sep 19, 2023
Methods for controlling a flow pulse shape
APPLIED MATERIALS INC0 citations62
US11713508B2Aug 1, 2023
Apparatus and methods for improving chemical utilization rate in deposition process
APPLIED MATERIALS INC0 citations62
US11583816B2Feb 21, 2023
Gas distribution plate for thermal deposition
APPLIED MATERIALS INC1 citations62
US11586789B2Feb 21, 2023
Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity
APPLIED MATERIALS INC1 citations62
US11560624B2Jan 24, 2023
Precursor delivery system
APPLIED MATERIALS INC0 citations62
US11479855B2Oct 25, 2022
Spatial wafer processing with improved temperature uniformity
APPLIED MATERIALS INC0 citations62
US11396703B2Jul 26, 2022
Apparatus and methods for improving chemical utilization rate in deposition process
APPLIED MATERIALS INC0 citations62
USD1103948SDec 2, 2025
Gas distribution plate
APPLIED MATERIALS INC0 citations61
USD1104086SDec 2, 2025
Gas distribution plate
APPLIED MATERIALS INC0 citations61
US11823870B2Nov 21, 2023
PEALD titanium nitride with direct microwave plasma
APPLIED MATERIALS INC0 citations59
US11520358B2Dec 6, 2022
Gas-pulsing-based shared precursor distribution system and methods of use
APPLIED MATERIALS INC0 citations59
US12060638B2Aug 13, 2024
Deposition apparatus and methods using staggered pumping locations
APPLIED MATERIALS INC0 citations52
US10787739B2Sep 29, 2020
Spatial wafer processing with improved temperature uniformity
APPLIED MATERIALS INC0 citations52
US12469739B2Nov 11, 2025
Methods of operating a spatial deposition tool
APPLIED MATERIALS INC0 citations51
US11923233B2Mar 5, 2024
Dual-function wafer backside pressure control and edge purge
APPLIED MATERIALS INC0 citations51
US12540398B2Feb 3, 2026
Showerhead pumping geometry for precursor containment
APPLIED MATERIALS INC0 citations50
US12590363B2Mar 31, 2026
Apparatus for single chamber deposition and etch
APPLIED MATERIALS INC0 citations48
US12442080B2Oct 14, 2025
Plasma showerhead assembly and method of reducing defects
APPLIED MATERIALS INC0 citations47