Inventor

TORII HIROTOSHI

JP20 patents

⚠️ This page may combine multiple inventors who share the name “TORII HIROTOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TORII HIROTOSHI

CANON KK

Imprint apparatus and article manufacturing method using same

Optical element holding apparatus

Imprint methods for forming a pattern of an imprint material on a substrate-side pattern region of a substrate by using a mold, and related device manufacturing methods

Imprint apparatus that forms a pattern of an imprint material on a substrate-side pattern region of a substrate using a mold, and related methods

Imprint apparatus for forming a pattern of an imprint material on a substrate-side pattern region of a substrate by using a mold, and related device manufacturing methods

Film forming apparatus and article manufacturing method

Imprint apparatus, manufacturing method for article, and computer program

Imprint apparatus and article manufacturing method

Imprint device and method for manufacturing article

Imprint apparatus and method of manufacturing article

Original and article manufacturing method using same

Optical element supporting device, lens barrel, exposure apparatus, and device manufacturing method

Imprint apparatus, imprinting mold, and method of manufacturing article

DAIKIN IND LTD

Cryogenic refrigerator

Regenerator and cryogenic refrigerator having regenerator

Hydraulic unit

TORII HIROTOSHI

Holding apparatus, imprint apparatus and article manufacturing method using same

Original and article manufacturing method using same

Imprint apparatus and article manufacturing method

TANAKA YUSUKE

Imprint apparatus and article manufacturing method