Inventor
HSAIO CHING-YEN
TW4 patents
Patents
4 patentsUS10978462B2Apr 13, 2021
Method for forming semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US10461088B2Oct 29, 2019
Method for forming semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46
US9941294B2Apr 10, 2018
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46
US11854808B2Dec 26, 2023
Photo mask and lithography method using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations37