Inventor
LEE SZETSEN STEVEN
TW11 patents
⚠️ This page may combine multiple inventors who share the name “LEE SZETSEN STEVEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WINBOND ELECTRONICS CORP
9 patentsUS6052183AApr 18, 2000
In-situ particle monitoring
WINBOND ELECTRONICS CORP26 citations91
US6440865B1Aug 27, 2002
Method of profile control in metal etching
WINBOND ELECTRONICS CORP16 citations82
US6064145AMay 16, 2000
Fabrication of field emitting tips
WINBOND ELECTRONICS CORP7 citations72
US6732295B2May 4, 2004
Method and system of frequency modulated end-point detection
WINBOND ELECTRONICS CORP2 citations61
US6628384B2Sep 30, 2003
Spectroscopic method and related apparatus for measuring electrode gap distance
WINBOND ELECTRONICS CORP2 citations61
US6450683B1Sep 17, 2002
Optical temperature measurement as an in situ monitor of etch rate
WINBOND ELECTRONICS CORP5 citations61
US6444401B1Sep 3, 2002
Fabrication of field emitting tips
WINBOND ELECTRONICS CORP3 citations61
US6932944B2Aug 23, 2005
High efficiency scrubber for waste gas abatement
WINBOND ELECTRONICS CORP1 citations46
US7001530B2Feb 21, 2006
Method for detecting the end point by using matrix
WINBOND ELECTRONICS CORP0 citations40