Inventor
TSAI CHAO-TZUNG
TW6 patents
⚠️ This page may combine multiple inventors who share the name “TSAI CHAO-TZUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
4 patentsUS7301645B2Nov 27, 2007
In-situ critical dimension measurement
TAIWAN SEMICONDUCTOR MFG14 citations83
US6878646B1Apr 12, 2005
Method to control critical dimension of a hard masked pattern
TAIWAN SEMICONDUCTOR MFG39 citations83
US7339253B2Mar 4, 2008
Retrograde trench isolation structures
TAIWAN SEMICONDUCTOR MFG12 citations81
US6962878B2Nov 8, 2005
Method to reduce photoresist mask line dimensions
TAIWAN SEMICONDUCTOR MFG0 citations48