Inventor
KAWANO BAIEI
JP5 patents
Patents
5 patentsUS7408225B2Aug 5, 2008
Apparatus and method for forming thin film using upstream and downstream exhaust mechanisms
ASM JAPAN406 citations98
US6921556B2Jul 26, 2005
Method of film deposition using single-wafer-processing type CVD
ASM JAPAN256 citations98
US7276123B2Oct 2, 2007
Semiconductor-processing apparatus provided with susceptor and placing block
ASM JAPAN30 citations92
US7381291B2Jun 3, 2008
Dual-chamber plasma processing apparatus
ASM JAPAN24 citations91
US7267725B2Sep 11, 2007
Thin-film deposition apparatus
ASM JAPAN18 citations82