Inventor

YUUKI HIROYUKI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “YUUKI HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

2 patents

US7706075B2Apr 27, 2010

Projection optical system, exposure apparatus, and device fabrication method

CANON KK1 citations43

US7714985B2May 11, 2010

Projection optical system

CANON KK0 citations37

SUMIYOSHI YUHEI

1 patent

US8437004B2May 7, 2013

Detection apparatus

SUMIYOSHI YUHEI0 citations43

YUUKI HIROYUKI

1 patent

US8432532B2Apr 30, 2013

Projection optical system with rarefaction compensation

YUUKI HIROYUKI0 citations25