Inventor
WILLIAMSON RICHARD E
US5 patents
⚠️ This page may combine multiple inventors who share the name “WILLIAMSON RICHARD E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FSI INT INC
2 patentsUS7819984B2Oct 26, 2010
Process for treatment of substrates with water vapor or steam
FSI INT INC17 citations90
US7913706B2Mar 29, 2011
Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatuses
FSI INT INC14 citations82