Inventor
CHEN SZ-FAN
TW8 patents
Patents
8 patentsUS11916022B2Feb 27, 2024
Photolithography alignment process for bonded wafers
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11769662B2Sep 26, 2023
Method for reducing charging of semiconductor wafers
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12165867B2Dec 10, 2024
Method for reducing charging of semiconductor wafers
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11665897B2May 30, 2023
Improving surface topography by forming spacer-like components
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11276699B2Mar 15, 2022
Surface topography by forming spacer-like components
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12230585B2Feb 18, 2025
Photolithography alignment process for bonded wafers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11362038B2Jun 14, 2022
Photolithography alignment process for bonded wafers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10522557B2Dec 31, 2019
Surface topography by forming spacer-like components
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51