Inventor

KIYAMA HIROKI

JP9 patents

⚠️ This page may combine multiple inventors who share the name “KIYAMA HIROKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KIYAMA HIROKI

3 patents

US8145046B2Mar 27, 2012

Heat treatment apparatus and method for heating substrate by light irradiation

KIYAMA HIROKI14 citations90

US8852966B2Oct 7, 2014

Heat treatment method and heat treatment apparatus of thin film

KIYAMA HIROKI15 citations82

US8498525B2Jul 30, 2013

Heat treatment apparatus and method for heating substrate by light irradiation

KIYAMA HIROKI4 citations60

DAINIPPON SCREEN MFG

3 patents

US8041198B2Oct 18, 2011

Heat treatment apparatus and method for heating substrate by photo-irradiation

DAINIPPON SCREEN MFG7 citations83

US8861944B2Oct 14, 2014

Heat treatment apparatus and method for heating substrate by light irradiation

DAINIPPON SCREEN MFG4 citations72

US9607870B2Mar 28, 2017

Heat treatment apparatus and heat treatment method for heating substrate by irradiating substrate with flash of light

DAINIPPON SCREEN MFG5 citations71

SCREEN HOLDINGS CO LTD

2 patents

US9875919B2Jan 23, 2018

Heat treatment method for heating substrate by irradiating substrate with flash of light

SCREEN HOLDINGS CO LTD0 citations50

US9437448B2Sep 6, 2016

Substrate treatment method and substrate treating apparatus

SCREEN HOLDINGS CO LTD1 citations50

KATO SHINICHI

1 patent

US8963050B2Feb 24, 2015

Apparatus for and method of heat-treating thin film on surface of substrate

KATO SHINICHI19 citations83