Inventor
JIANG XUGUANG
US9 patents
⚠️ This page may combine multiple inventors who share the name “JIANG XUGUANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
5 patentsUS10324046B1Jun 18, 2019
Methods and systems for monitoring a non-defect related characteristic of a patterned wafer
KLA TENCOR CORP5 citations68
US10533953B2Jan 14, 2020
System and method for wafer inspection with a noise boundary threshold
KLA TENCOR CORP1 citations60
US10372113B2Aug 6, 2019
Method for defocus detection
KLA TENCOR CORP0 citations51
US10402963B2Sep 3, 2019
Defect detection on transparent or translucent wafers
KLA TENCOR CORP0 citations40
US10043265B2Aug 7, 2018
System, method and computer program product for identifying fabricated component defects using a local adaptive threshold
KLA TENCOR CORP0 citations40
KLA CORP
3 patentsUS11610296B2Mar 21, 2023
Projection and distance segmentation algorithm for wafer defect detection
KLA CORP0 citations53
US11676260B2Jun 13, 2023
Variation-based segmentation for wafer defect detection
KLA CORP0 citations47
US11748871B2Sep 5, 2023
Alignment of a specimen for inspection and other processes
KLA CORP0 citations41