Inventor
SURLA VIJAY
US6 patents
Patents
6 patentsUS9659788B2May 23, 2017
Nitrogen-containing compounds for etching semiconductor structures
AIR LIQUIDE AMERICAN13 citations83
US11430663B2Aug 30, 2022
Iodine-containing compounds for etching semiconductor structures
AIR LIQUIDE AMERICAN3 citations72
US10607850B2Mar 31, 2020
Iodine-containing compounds for etching semiconductor structures
AIR LIQUIDE AMERICAN4 citations72
US10256109B2Apr 9, 2019
Nitrogen-containing compounds for etching semiconductor structures
AIR LIQUIDE AMERICAN2 citations72
US9773679B2Sep 26, 2017
Method of etching semiconductor structures with etch gas
AIR LIQUIDE AMERICAN3 citations72
US10115600B2Oct 30, 2018
Method of etching semiconductor structures with etch gas
AIR LIQUIDE AMERICAN1 citations51