Inventor

HIRATE AKIHIRO

JP2 patents

Patents

2 patents

US11555255B2Jan 17, 2023

Tantalum carbide coated carbon material, manufacturing method thereof, and member for apparatus for manufacturing semiconductor single crystal

SHINETSU CHEMICAL CO0 citations56

US11897773B2Feb 13, 2024

Carbide-coated carbon material

SHINETSU CHEMICAL CO0 citations53