Inventor
PEREZ-FALCON VICTOR ANTONIO
US7 patents
⚠️ This page may combine multiple inventors who share the name “PEREZ-FALCON VICTOR ANTONIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
5 patentsUS11500298B2Nov 15, 2022
Reticle sub-field thermal control
ASML HOLDING NV4 citations67
US12174552B2Dec 24, 2024
Lithographic apparatus and electrostatic clamp designs
ASML HOLDING NV0 citations58
US11892779B2Feb 6, 2024
Optical component and clamp used in lithographic apparatus
ASML HOLDING NV0 citations58
US11048175B2Jun 29, 2021
Apparatus for and method cleaning a support inside a lithography apparatus
ASML HOLDING NV1 citations57
US11550231B2Jan 10, 2023
Apparatus for and method of in-situ particle removal in a lithography apparatus
ASML HOLDING NV1 citations53