Inventor
CHING CARY
US3 patents
Patents
3 patentsUS6060397AMay 9, 2000
Gas chemistry for improved in-situ cleaning of residue for a CVD apparatus
APPLIED MATERIALS INC107 citations94
US6153540ANov 28, 2000
Method of forming phosphosilicate glass having a high wet-etch rate
APPLIED MATERIALS INC3 citations60
US7431967B2Oct 7, 2008
Limited thermal budget formation of PMD layers
APPLIED MATERIALS INC3 citations57