Inventor · disambiguated record
Richard L. Kleinhenz
Also filed as: KLEINHENZ RICHARD · KLEINHENZ RICHARD L · KLEINHENZ RICHARD LEO
15 granted patents·1 pending application·920 citations·filing 1995–2010
95Inventor score
Top patents by PatentIndex Score
16 records- 0196US6319794B1Structure and method for producing low leakage isolation devicesIBM·Filed 1998·Granted Nov 20, 2001·258 cites·19 claims
- 0294US5838055ATrench sidewall patterned by vapor phase etchingIBM·Filed 1997·Granted Nov 17, 1998·135 cites·2 claims
- 0391US5770484AMethod of making silicon on insulator buried plate trench capacitorIBM·Filed 1996·Granted Jun 23, 1998·103 cites·23 claims
- 0485US6071815AMethod of patterning sidewalls of a trench in integrated circuit manufacturingIBM·Filed 1998·Granted Jun 6, 2000·63 cites·4 claims
- 0583US6140175ASelf-aligned deep trench DRAM array deviceIBM·Filed 1999·Granted Oct 31, 2000·44 cites·14 claims
- 0682US6074951AVapor phase etching of oxide masked by resist or masking materialIBM·Filed 1997·Granted Jun 13, 2000·66 cites·12 claims
- 0782US5876879AOxide layer patterned by vapor phase etchingIBM·Filed 1997·Granted Mar 2, 1999·61 cites·10 claims
- 0882US5805494ATrench capacitor structuresIBM·Filed 1997·Granted Sep 8, 1998·44 cites·11 claims
- 0979US6057188ATrench capacitor structuresIBM·Filed 1998·Granted May 2, 2000·38 cites·3 claims
- 1078US8634949B2Manufacturing management using tool operating dataBARKER BRIAN C·Filed 2010·Granted Jan 21, 2014·8 cites·20 claims
- 1175US6107135AMethod of making a semiconductor memory device having a buried plate electrodeTOSHIBA KK·Filed 1998·Granted Aug 22, 2000·32 cites·14 claims
- 1270US5970009AReduced stand by power consumption in a DRAMSIEMENS AG·Filed 1997·Granted Oct 19, 1999·28 cites·18 claims
- 1360US6190955B1Fabrication of trench capacitors using disposable hard maskIBM·Filed 1998·Granted Feb 20, 2001·25 cites·19 claims
- 1446US6528335B2Electrical method for assessing yield-limiting asperities in silicon-on-insulator wafersIBM·Filed 2001·Granted Mar 4, 2003·3 cites·18 claims
- 1545US5592412AEnhanced deep trench storage node capacitance for DRAMSIEMENS AG·Filed 1995·Granted Jan 7, 1997·12 cites·20 claims
- 1634US2002187619A1Gettering process for bonded SOI wafersIBM·Filed 2001·Application pending·0 cites
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