Inventor
MANI BALARAMAN
US4 patents
Patents
4 patentsUS6452198B1Sep 17, 2002
Minimized contamination of semiconductor wafers within an implantation system
ADVANCED MICRO DEVICES INC21 citations91
US6536370B2Mar 25, 2003
Elapsed time indicator for controlled environments and method of use
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US6448180B2Sep 10, 2002
Deposition of in-situ doped semiconductor film and undoped semiconductor film in the same reaction chamber
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US6410434B1Jun 25, 2002
Method and apparatus for formation of in-situ doped amorphous semiconductor film
ADVANCED MICRO DEVICES INC13 citations70