Inventor

ROTHWEILER DIRK

DE3 patents

⚠️ This page may combine multiple inventors who share the name “ROTHWEILER DIRK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

2 patents

US7329886B2Feb 12, 2008

EUV illumination system having a plurality of light sources for illuminating an optical element

ZEISS CARL SMT AG18 citations83

US7071476B2Jul 4, 2006

Illumination system with a plurality of light sources

ZEISS CARL SMT AG13 citations82

ZEISS STIFTUNG

1 patent

US6570168B1May 27, 2003

Illumination system with a plurality of light sources

ZEISS STIFTUNG55 citations94