Inventor
WIETZORREK JOCHEN
DE3 patents
Patents
3 patentsUS7015489B2Mar 21, 2006
Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm
ZEISS CARL SMT AG36 citations95
US7460212B2Dec 2, 2008
Collector configured of mirror shells
ZEISS CARL SMT AG11 citations92
US7244954B2Jul 17, 2007
Collector having unused region for illumination systems using a wavelength ≦193 nm
ZEISS CARL SMT AG14 citations92