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Inventor
FERRELL JAMES J
US
4 patents
⚠️ This page may combine multiple inventors who share the name “FERRELL JAMES J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
2 patents
US7564888B2
Jul 21, 2009
High power excimer laser with a pulse stretcher
CYMER INC
7 citations
70
US7995637B2
Aug 9, 2011
Gas discharge laser chamber
CYMER INC
1 citations
48
YE HONG
2 patents
US8982922B2
Mar 17, 2015
Very high power laser chamber optical improvements
YE HONG
2 citations
54
US8284815B2
Oct 9, 2012
Very high power laser chamber optical improvements
YE HONG
5 citations
54