Inventor
DETTMANN WOLFGANG
DE6 patents
Patents
6 patentsUS10856767B2Dec 8, 2020
300 MHz to 3 THz electromagnetic wave sensor for determining an interstitial fluid parameter in vivo
INFINEON TECHNOLOGIES AG2 citations70
US7393613B2Jul 1, 2008
Set of at least two masks for the projection of structure patterns
INFINEON TECHNOLOGIES AG7 citations70
US9838086B2Dec 5, 2017
Communication arrangement
INFINEON TECHNOLOGIES AG3 citations66
US7393614B2Jul 1, 2008
Set of masks including a first mask and a second trimming mask with a semitransparent region having a transparency between 20% and 80% to control diffraction effects and obtain maximum depth of focus for the projection of structure patterns onto a semiconductor wafer
INFINEON TECHNOLOGIES AG3 citations60
US7262850B2Aug 28, 2007
Method for inspection of periodic grating structures on lithography masks
INFINEON TECHNOLOGIES AG3 citations59
US7045254B2May 16, 2006
Mask with programmed defects and method for the fabrication thereof
INFINEON TECHNOLOGIES AG6 citations53