Inventor
CHUC KIEN N
US15 patents
⚠️ This page may combine multiple inventors who share the name “CHUC KIEN N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
13 patentsUS9144147B2Sep 22, 2015
Semiconductor processing system and methods using capacitively coupled plasma
APPLIED MATERIALS INC188 citations99
US5537508AJul 16, 1996
Method and dry vapor generator channel assembly for conveying a liquid from a liquid source to a liquid vaporizer with minimal liquid stagnation
APPLIED MATERIALS INC27 citations91
US5129994AJul 14, 1992
Method and apparatus to inhibit obstruction of optical transmission through semiconductor etch process chamber viewport
APPLIED MATERIALS INC21 citations78
US10711347B2Jul 14, 2020
Micro-volume deposition chamber
APPLIED MATERIALS INC2 citations73
US10550472B2Feb 4, 2020
Flow control features of CVD chambers
APPLIED MATERIALS INC2 citations73
US12146219B2Nov 19, 2024
Flow control features of CVD chambers
APPLIED MATERIALS INC0 citations62
US11512391B2Nov 29, 2022
Process kit for a high throughput processing chamber
APPLIED MATERIALS INC0 citations62
USD946534SMar 22, 2022
Radio frequency conduit
APPLIED MATERIALS INC1 citations61
US11270905B2Mar 8, 2022
Modulating film properties by optimizing plasma coupling materials
APPLIED MATERIALS INC0 citations61
US10113231B2Oct 30, 2018
Process kit including flow isolator ring
APPLIED MATERIALS INC1 citations52
US10724138B2Jul 28, 2020
Process kit for a high throughput processing chamber
APPLIED MATERIALS INC0 citations51
US10017855B2Jul 10, 2018
Process kit for a high throughput processing chamber
APPLIED MATERIALS INC0 citations51
US10240234B2Mar 26, 2019
Gas distribution apparatus for processing chambers
APPLIED MATERIALS INC0 citations41