P

Inventor

RONG SONGNIAN

US7 patents
⚠️ This page may combine multiple inventors who share the name “RONG SONGNIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

4 patents
US10181185B2Jan 15, 2019

Image based specimen process control

KLA TENCOR CORP21 citations93
US9576861B2Feb 21, 2017

Method and system for universal target based inspection and metrology

KLA TENCOR CORP2 citations72
US11295438B2Apr 5, 2022

Method and system for mixed mode wafer inspection

KLA TENCOR CORP0 citations61
US10192303B2Jan 29, 2019

Method and system for mixed mode wafer inspection

KLA TENCOR CORP0 citations51

GAO LISHENG

1 patent
US8989479B2Mar 24, 2015

Region based virtual fourier filter

GAO LISHENG3 citations54

MAHADEVAN MOHAN

1 patent
US9053390B2Jun 9, 2015

Automated inspection scenario generation

MAHADEVAN MOHAN0 citations40

THATTAISUNDARAM GOVIND

1 patent
US9360863B2Jun 7, 2016

Data perturbation for wafer inspection or metrology setup using a model of a difference

THATTAISUNDARAM GOVIND0 citations31