Inventor
MAYS BRAD L
US15 patents
⚠️ This page may combine multiple inventors who share the name “MAYS BRAD L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
13 patentsUS10378108B2Aug 13, 2019
Showerhead with reduced backside plasma ignition
APPLIED MATERIALS INC6 citations84
US9666466B2May 30, 2017
Electrostatic chuck having thermally isolated zones with minimal crosstalk
APPLIED MATERIALS INC10 citations83
US10745807B2Aug 18, 2020
Showerhead with reduced backside plasma ignition
APPLIED MATERIALS INC3 citations73
US10490429B2Nov 26, 2019
Substrate carrier using a proportional thermal fluid delivery system
APPLIED MATERIALS INC2 citations71
US9991148B2Jun 5, 2018
Electrostatic chuck having thermally isolated zones with minimal crosstalk
APPLIED MATERIALS INC1 citations62
US11615973B2Mar 28, 2023
Substrate carrier using a proportional thermal fluid delivery system
APPLIED MATERIALS INC0 citations61
US10928145B2Feb 23, 2021
Dual zone common catch heat exchanger/chiller
APPLIED MATERIALS INC0 citations61
US10854425B2Dec 1, 2020
Feedforward temperature control for plasma processing apparatus
APPLIED MATERIALS INC1 citations61
US10546731B1Jan 28, 2020
Method, apparatus and system for wafer dechucking using dynamic voltage sweeping
APPLIED MATERIALS INC1 citations61
US11088005B2Aug 10, 2021
Electrostatic chuck having thermally isolated zones with minimal crosstalk
APPLIED MATERIALS INC0 citations59
US10304715B2May 28, 2019
Electrostatic chuck having thermally isolated zones with minimal crosstalk
APPLIED MATERIALS INC0 citations50
US10274270B2Apr 30, 2019
Dual zone common catch heat exchanger/chiller
APPLIED MATERIALS INC0 citations50
US9214315B2Dec 15, 2015
Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow
APPLIED MATERIALS INC0 citations50