Inventor
TU SHENG-HUNG
TW8 patents
⚠️ This page may combine multiple inventors who share the name “TU SHENG-HUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
7 patentsUS10472567B2Nov 12, 2019
Compositions and methods for selectively etching titanium nitride
ENTEGRIS INC4 citations71
US10428271B2Oct 1, 2019
Compositions and methods for selectively etching titanium nitride
ENTEGRIS INC3 citations71
US10392560B2Aug 27, 2019
Compositions and methods for selectively etching titanium nitride
ENTEGRIS INC4 citations71
US10651045B2May 12, 2020
Compositions and methods for etching silicon nitride-containing substrates
ENTEGRIS INC3 citations68
US10790187B2Sep 29, 2020
Post-etch residue removal for advanced node beol processing
ENTEGRIS INC0 citations48
US9765288B2Sep 19, 2017
Compositions for cleaning III-V semiconductor materials and methods of using same
ENTEGRIS INC0 citations40
US10340150B2Jul 2, 2019
Ni:NiGe:Ge selective etch formulations and method of using same
ENTEGRIS INC0 citations38