Inventor
HSU JYH-SHIOU
TW13 patents
⚠️ This page may combine multiple inventors who share the name “HSU JYH-SHIOU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
8 patentsUS9579697B2Feb 28, 2017
System and method of cleaning FOUP
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12009242B2Jun 11, 2024
Wafer transport container
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations69
US11854851B2Dec 26, 2023
Interface tool
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12193164B2Jan 7, 2025
Oxygen and humidity control in storage device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US11723152B2Aug 8, 2023
Oxygen and humidity control in storage device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations56
US12172117B2Dec 24, 2024
Laminar gas flow filter
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55
US9530617B2Dec 27, 2016
In-situ charging neutralization
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51
US10991604B2Apr 27, 2021
Method of manufacturing semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
TAIWAN SEMICONDUCTOR MFG
5 patentsUS6569777B1May 27, 2003
Plasma etching method to form dual damascene with improved via profile
TAIWAN SEMICONDUCTOR MFG105 citations94
US6498106B1Dec 24, 2002
Prevention of defects formed in photoresist during wet etching
TAIWAN SEMICONDUCTOR MFG19 citations91
US7015089B2Mar 21, 2006
Method to improve etching of resist protective oxide (RPO) to prevent photo-resist peeling
TAIWAN SEMICONDUCTOR MFG23 citations90
US7265053B2Sep 4, 2007
Trench photolithography rework for removal of photoresist residue
TAIWAN SEMICONDUCTOR MFG0 citations50
US7001784B2Feb 21, 2006
Method to control spacer width
TAIWAN SEMICONDUCTOR MFG0 citations33