Inventor
LIU CHI-PING
TW5 patents
Patents
5 patentsUS10691864B2Jun 23, 2020
Method of post optical proximity correction (OPC) printing verification by machine learning
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations82
US11048161B2Jun 29, 2021
Optical proximity correction methodology using pattern classification for target placement
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10520829B2Dec 31, 2019
Optical proximity correction methodology using underlying layer information
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11308256B2Apr 19, 2022
Method of post optical proximity correction (OPC) printing verification by machine learning
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US10527928B2Jan 7, 2020
Optical proximity correction methodology using pattern classification for target placement
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51