Inventor
HU CHIEN-CHUN
TW4 patents
Patents
4 patentsUS12368062B2Jul 22, 2025
Reflector and/or method for ultraviolet curing of semiconductor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11929267B1Mar 12, 2024
Reflector and/or method for ultraviolet curing of semiconductor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12172117B2Dec 24, 2024
Laminar gas flow filter
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55
US10522369B2Dec 31, 2019
Method and system for cleaning wafer and scrubber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations30